Lipovskii A A, Kuittinen M, Karvinen P, Leinonen K, Melehin V G, Zhurikhina V V, Svirko Yu P
St Petersburg Polytechnic University, St Petersburg, 195251, Russia.
Nanotechnology. 2008 Oct 15;19(41):415304. doi: 10.1088/0957-4484/19/41/415304. Epub 2008 Sep 3.
We demonstrate that the dissolution of 10 nm metal nanoparticles localized in the subsurface layer of silicate glass by static electric field can be employed to alter the optical density and surface profile of the glass-metal composite with spatial resolution of 200 nm. The developed technique, which can be referred to as electric field imprinting (EFI), offers an attractive alternative to conventional micro- and nano-pattering techniques.
我们证明，通过静电场溶解位于硅酸盐玻璃次表层的10纳米金属纳米颗粒，可用于改变玻璃-金属复合材料的光密度和表面轮廓，空间分辨率可达200纳米。这种已开发的技术，可称为电场压印（EFI），为传统的微纳光刻技术提供了一种有吸引力的替代方法。
