Department of Physics, National Taiwan University, Taipei, Taiwan.
Nanotechnology. 2011 Sep 7;22(36):365303. doi: 10.1088/0957-4484/22/36/365303. Epub 2011 Aug 11.
Porous anodic aluminum oxide (AAO) membranes have been widely used as templates for growing nanomaterials because of their ordered nanochannel arrays with high aspect ratio and uniform pore diameter. However, the intrinsic growth behavior of an individual AAO nanochannel has never been carefully studied for the lack of a means to fabricate a single isolated anodic alumina nanochannel (SIAAN). In this study, we develop a lithographic method for fabricating a SIAAN, which grows into a porous hemispherical structure with its pores exhibiting fascinating morphological evolution during anodization. We also discover that the mechanical stress affects the growth rate and pore morphology of AAO porous structures. This study helps reveal the growth mechanism of arrayed AAO nanochannels grown on a flat aluminum surface and provides insights to help pave the way to altering the geometry of nanochannels on AAO templates for the fabrication of advanced nanocomposite materials.
多孔阳极氧化铝(AAO)膜因其具有高纵横比和均匀孔径的有序纳米通道阵列而被广泛用作生长纳米材料的模板。然而,由于缺乏制造单个孤立的阳极氧化铝纳米通道(SIAAN)的手段,因此从未仔细研究过单个 AAO 纳米通道的内在生长行为。在这项研究中,我们开发了一种用于制造 SIAAN 的光刻方法,该方法可生长成具有多孔半球形结构的 SIAAN,其在阳极氧化过程中表现出迷人的形态演化。我们还发现机械应力会影响 AAO 多孔结构的生长速度和孔径形态。这项研究有助于揭示在平整铝表面上生长的阵列 AAO 纳米通道的生长机制,并为改变 AAO 模板上纳米通道的几何形状以制造先进的纳米复合材料提供了启示。