Korea Research Institute of Standards and Science (KRISS), Yuseong, 305-340 Daejeon, Korea.
Nanotechnology. 2010 Dec 3;21(48):485304. doi: 10.1088/0957-4484/21/48/485304. Epub 2010 Nov 10.
A new anodization method for the preparation of nanoporous anodic aluminum oxide (AAO) with pattern-addressed pore structure was developed. The approach is based on pulse anodization of aluminum employing a series of potential waves that consist of two or more different pulses with designated periods and amplitudes, and provides unique tailoring capability of the internal pore structure of anodic alumina. Pores of the resulting AAOs exhibit a high degree of directional coherency along the pore axes without branching, and thus are suitable for fabricating novel nanowires or nanotubes, whose diameter modulation patterns are predefined by the internal pore geometry of AAO. It is found from microscopic analysis on pulse anodized AAOs that the effective electric field strength at the pore base is a key controlling parameter, governing not only the size of pores, but also the detailed geometry of the barrier oxide layer.
一种新的阳极氧化方法用于制备具有图案寻址孔结构的纳米多孔阳极氧化铝 (AAO)。该方法基于采用一系列具有指定周期和幅度的多个不同脉冲的铝脉冲阳极氧化,为阳极氧化铝的内部孔结构提供了独特的定制能力。所得 AAO 的孔具有沿着孔轴的高度定向连贯性,没有分支,因此适合制造新型纳米线或纳米管,其直径调制图案由 AAO 的内部孔几何形状预先确定。通过对脉冲阳极氧化 AAO 的微观分析发现,孔底部的有效电场强度是一个关键控制参数,不仅控制着孔的大小,而且控制着阻挡氧化层的详细几何形状。