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使用锥形多模干涉区实现自成像光子晶体波导分束器的宽松制造公差。

Relaxed fabrication tolerance for self-imaging photonic crystal waveguide splitters using a tapered multimode interference region.

机构信息

Interdisciplinary Nanoscience Center, Aarhus University, DK-8000 Århus C, Denmark.

出版信息

Opt Lett. 2011 Aug 15;36(16):3058-60. doi: 10.1364/OL.36.003058.

DOI:10.1364/OL.36.003058
PMID:21847159
Abstract

The power imbalance between different waveguide outputs is compensated by manipulating the dispersion of the guided propagation in the multimode interference (MMI) region. This is attainable using a tapered region at the beginning of the MMI region that has been verified through simulation and experiment. From this, the fabrication tolerance for the diameters of holes in a tapered 1×3 photonic crystal waveguide (PhCW) splitter is relaxed up to a range of at least 27 nm. The output power is well-balanced to within 1 dB. The effective bandwidth of the splitters shifts only around 13 nm, for a reduction of 10 nm in the diameter of the PhCW holes. The optimized component is an outstanding ultracompact 1×3 splitter for the photonic integrated circuit (PIC).

摘要

通过在多模干涉(MMI)区域中控制导波传播的色散,可以补偿不同波导输出之间的功率不平衡。这可以通过在 MMI 区域的起始处使用锥形区域来实现,已经通过仿真和实验进行了验证。由此,锥形 1×3 光子晶体波导(PhCW)分束器中孔直径的制造公差放宽到至少 27nm 的范围。输出功率在 1dB 以内得到很好的平衡。对于 PhCW 孔直径减小 10nm,分束器的有效带宽仅移动约 13nm。优化后的组件是光子集成电路(PIC)中出色的超紧凑 1×3 分束器。

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