Optoelectronics Research Centre, University of Southampton, Southampton SO17 1BJ, UK.
Opt Lett. 2011 Aug 15;36(16):3067-9. doi: 10.1364/OL.36.003067.
Low-cost, compact, automated optical microsystems for chemical analysis, such as microflow cytometers for identification of individual biological cells, require monolithically integrated microlenses for focusing in microfluidic channels, to enable high-resolution scattering and fluorescence measurements. The multimode interference device (MMI), which makes use of self-imaging in multimode waveguides, is shown to be a simple and effective alternative to the microlens for microflow cytometry. The MMIs have been designed, realized, and integrated with microfluidic channels in a silica-based glass waveguide material system. Focal spot sizes of 2.4 μm for MMIs have been measured at foci as far as 43.7 μm into the microfluidic channel.
低成本、紧凑、自动化的光学微系统，用于化学分析，例如用于识别单个生物细胞的微流细胞仪，需要用于在微流道中聚焦的整体集成微透镜，以实现高分辨率的散射和荧光测量。多模干涉器件（MMI）利用多模波导中的自成像，被证明是微流细胞仪用微透镜的简单有效替代方案。MMI 已经在基于二氧化硅的玻璃波导材料系统中进行了设计、实现和与微流道的集成。在微流道中 43.7 μm 的深处，MMI 的焦点光斑尺寸测量值为 2.4 μm。
