Groupe de Physique des Matériaux - GPM UMR CNRS 6634, Université de Rouen, France.
Ultramicroscopy. 2011 Jul;111(8):1286-94. doi: 10.1016/j.ultramic.2011.04.001. Epub 2011 Apr 17.
Data collected in atom probe tomography have to be carefully analysed in order to give reliable composition data accurately and precisely positioned in the probed volume. Indeed, the large analysed surfaces of recent instruments require reconstruction methods taking into account not only the tip geometry but also accurate knowledge of geometrical projection parameters. This is particularly crucial in the analysis of multilayers materials or planar interfaces. The current work presents a simulation model that enables extraction of the two main projection features as a function of the tip and atom probe instrumentation geometries. Conversely to standard assumptions, the image compression factor and the field factor vary significantly during the analysis. An improved reconstruction method taking into account the intrinsic shape of a sample containing planar features is proposed to overcome this shortcoming.
为了准确、精确地给出探测体积中定位的可靠成分数据，必须仔细分析原子探针断层成像技术所采集的数据。事实上，最近仪器的大分析表面需要重建方法，不仅要考虑尖端几何形状，还要准确了解几何投影参数。这在分析多层材料或平面界面时尤为关键。目前的工作提出了一种模拟模型，该模型能够提取作为尖端和原子探针仪器几何形状函数的两个主要投影特征。与标准假设相反，在分析过程中，图像压缩因子和场因子会发生显著变化。提出了一种改进的重建方法，该方法考虑了包含平面特征的样品的固有形状，以克服这一缺陷。
