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使用扫描电子显微镜对亚微米颗粒进行定量能量色散 X 射线分析。

Quantitative energy dispersive X-ray analysis of submicrometric particles using a scanning electron microscope.

机构信息

Dipartimento di Tecnologie e Salute, Istituto Superiore di Sanità, V.le Regina Elena, 299 - I-00161 Roma, Italy.

出版信息

Microsc Microanal. 2011 Oct;17(5):710-7. doi: 10.1017/S1431927611000432. Epub 2011 Sep 6.

DOI:10.1017/S1431927611000432
PMID:21892993
Abstract

The quantitative scanning electron microscope-energy dispersive X-ray (SEM-EDX) analysis of a horneblende and two augite prismatic samples reduced to submicrometric particles was performed, and error due to the particle effects ("absent mass" and the "reduced absorption" effect) was minimized. Correction factors as a function of fragment size were obtained for O, Na, Mg, Si, Ca, and Fe. In addition, the influence of chemical composition of the samples used as standards (the matrix effect) on correction factors was evaluated. The results indicate that the absent mass effect is dominant for all elements except for the light elements O and Na, for which the reduced absorption effect is dominant. No significant matrix effect has been observed. By using corrected SEM-EDX data, the error on quantification of the element concentration has been estimated to be 3% relative for light elements and below 2% relative for heavy elements (notably, about 1% relative for Fe).

摘要

对细化至亚微米颗粒的角闪石和两种辉石棱柱体样本进行了定量扫描电子显微镜-能量色散 X 射线(SEM-EDX)分析,并将颗粒效应引起的误差(“缺失质量”和“降低吸收”效应)降至最低。获得了 O、Na、Mg、Si、Ca 和 Fe 等元素的碎片尺寸函数的校正因子。此外,还评估了用作标准的样品化学成分(基体效应)对校正因子的影响。结果表明,除轻元素 O 和 Na 外,所有元素都存在缺失质量效应,而轻元素 O 和 Na 则存在降低吸收效应。未观察到明显的基体效应。通过使用校正后的 SEM-EDX 数据,估计元素浓度定量的误差相对较轻元素为 3%,相对较重元素为 2%(值得注意的是,Fe 约为 1%)。

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