具有102纳米连续单模调谐的表面微机械可调谐1.55微米垂直腔面发射激光器

Surface micromachined tunable 1.55 μm-VCSEL with 102 nm continuous single-mode tuning.

作者信息

Gierl C, Gruendl T, Debernardi P, Zogal K, Grasse C, Davani H A, Böhm G, Jatta S, Küppers F, Meissner P, Amann M-C

机构信息

Technische Universitaet Darmstadt, Institut fuer Mikrowellentechnik und Photonik, Darmstadt, Germany.

出版信息

Opt Express. 2011 Aug 29;19(18):17336-43. doi: 10.1364/OE.19.017336.

DOI:10.1364/OE.19.017336

PMID:21935097

Abstract

For the first time a vertical-cavity surface-emitting laser (VCSEL) with a single-mode wavelength-tuning over 102 nm in the range of 1550 nm is demonstrated. The fiber-coupled optical output power has a maximum of 3.5 mW and is > 2 mW over the entire tuning range. The sidemode suppression ratios are > 45 dB. The wavelength tuning is achieved with the micro-electro mechanical actuation of a mirror membrane fabricated with surface micro-machining for on-wafer mass production. The mirror membrane consists of low cost dielectric materials (SiOx/SiNy) deposited with low temperature (< 100°C) Plasma Enhanced Chemical Vapor Deposition (PECVD).

摘要

首次展示了一种垂直腔面发射激光器（VCSEL），其在1550 nm范围内的单模波长调谐超过102 nm。光纤耦合光输出功率最大为3.5 mW，并且在整个调谐范围内大于2 mW。边模抑制比大于45 dB。波长调谐是通过对采用表面微加工制造的镜膜进行微机电驱动来实现的，以用于晶圆级批量生产。镜膜由通过低温（<100°C）等离子体增强化学气相沉积（PECVD）沉积的低成本介电材料（SiOx/SiNy）组成。