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AT 切石英台基谐振器的厚度切变和厚度扭转振动。

Thickness-shear and thickness-twist vibrations of an AT-cut quartz mesa resonator.

机构信息

Department of Engineering Mechanics, Shijiazhuang Tiedao University, Shijiazhuang, China.

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 2011 Oct;58(10):2050-5. doi: 10.1109/TUFFC.2011.2055.

Abstract

We study thickness-shear and thickness-twist vibrations of an AT-cut quartz plate mesa resonator with stepped thickness. The equations of anisotropic elasticity are used with the omission of the small elastic constant c(56). An analytical solution is obtained using Fourier series from which the resonant frequencies, mode shapes, and energy trapping are calculated and examined. The solution shows that a mesa resonator exhibits strong energy trapping of thickness-shear and thickness-twist modes, and that the trapping is sensitive to some of the structural parameters of the resonator.

摘要

我们研究了具有阶跃厚度的 AT 切石英板台体谐振器的厚度剪切和厚度扭转振动。利用各向异性弹性的方程,略去小弹性常数 c(56)。利用傅里叶级数得到了一个解析解,从中计算并考察了共振频率、模态形状和能量俘获。该解表明,台体谐振器表现出对厚度剪切和厚度扭转模式的强烈能量俘获,并且这种俘获对谐振器的一些结构参数敏感。

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