微机电系统布拉格光栅力传感器

MEMS Bragg grating force sensor.

作者信息

Reck Kasper, Thomsen Erik V, Hansen Ole

机构信息

Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345 East, DK-2800 Kongens Lyngby, Denmark.

出版信息

Opt Express. 2011 Sep 26;19(20):19190-8. doi: 10.1364/OE.19.019190.

DOI:10.1364/OE.19.019190

PMID:21996861

Abstract

We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh environments and for remote and distributed sensing and has a measured sensitivity of -14 nm/N, which is several times higher than what is obtained in conventional fiber Bragg grating force sensors.

摘要

我们展示了一种新型全光频率调制微机电系统（MEMS）力传感器的建模、设计、制造和特性表征。该传感器基于具有集成布拉格光栅的机械放大双钳位波导梁结构，非常适合在恶劣环境中进行力测量以及远程和分布式传感，其测量灵敏度为-14 nm/N，比传统光纤布拉格光栅力传感器的灵敏度高出数倍。