化学气相传感中聚合物涂层微球谐振器的模拟与优化

Simulation and optimization of polymer-coated microsphere resonators in chemical vapor sensing.

作者信息

Lin Nai, Jiang Lan, Wang Sumei, Chen Qianghua, Xiao Hai, Lu Yongfeng, Tsai Hailung

机构信息

Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing, China.

出版信息

Appl Opt. 2011 Oct 1;50(28):5465-72. doi: 10.1364/AO.50.005465.

DOI:10.1364/AO.50.005465

PMID:22016214

Abstract

This study presents a chemical vapor sensor based on polymer-coated microsphere resonators. A theoretical simulation of the sensor response is performed, and optimization of the polymer layer thickness is investigated. Results show that the sensor exhibits a good linearity and a low detection limit of the refractive index change. Especially at the thermostable thickness of the polymer layer, the refractive index detection limit of the wavelength around 780 nm can be as low as ~2×10⁻⁸ refractive index unit for a spectral resolution of 10 fm, without any temperature control. Because of the good sensing performance and simple manipulation, the proposed sensor is a very promising platform for chemical vapor detections.

摘要

本研究提出了一种基于聚合物涂层微球谐振器的化学气相传感器。对传感器响应进行了理论模拟，并研究了聚合物层厚度的优化。结果表明，该传感器具有良好的线性度和低折射率变化检测限。特别是在聚合物层的热稳定厚度下，对于10 fm的光谱分辨率，780 nm左右波长的折射率检测限可低至约2×10⁻⁸折射率单位，无需任何温度控制。由于其良好的传感性能和简单的操作，所提出的传感器是用于化学气相检测的非常有前景的平台。