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采用CMOS兼容工艺制造的光子晶体慢光波导中的非线性增强。

Nonlinear enhancement in photonic crystal slow light waveguides fabricated using CMOS-compatible process.

作者信息

Shinkawa Mizuki, Ishikura Norihiro, Hama Yosuke, Suzuki Keijiro, Baba Toshihiko

机构信息

Department of Electrical and Computer Engineering, Yokohama National University, 79-5 Tokiwadai, Yokohama 240-8501, Japan.

出版信息

Opt Express. 2011 Oct 24;19(22):22208-18. doi: 10.1364/OE.19.022208.

DOI:10.1364/OE.19.022208
PMID:22109063
Abstract

We have studied low-dispersion slow light and its nonlinear enhancement in photonic crystal waveguides. In this work, we fabricated the waveguides using Si CMOS-compatible process. It enables us to integrate spotsize converters, which greatly simplifies the optical coupling from fibers as well as demonstration of the nonlinear enhancement. Two-photon absorption, self-phase modulation and four-wave mixing were observed clearly for picosecond pulses in a 200-μm-long device. In comparison with Si wire waveguides, a 60-120 fold higher nonlinearity was evaluated for a group index of 51. Unique intensity response also occurred due to the specific transmission spectrum and enhanced nonlinearities. Such slow light may add various functionalities in Si photonics, while loss reduction is desired for ensuring the advantage of slow light.

摘要

我们研究了光子晶体波导中的低色散慢光及其非线性增强。在这项工作中,我们使用与硅互补金属氧化物半导体(Si CMOS)兼容的工艺制造了这些波导。这使我们能够集成光斑尺寸转换器,极大地简化了来自光纤的光耦合以及非线性增强的演示。在一个200微米长的器件中,对于皮秒脉冲,清晰地观察到了双光子吸收、自相位调制和四波混频。与硅线波导相比,对于51的群折射率,评估出的非线性高60 - 120倍。由于特定的传输光谱和增强的非线性,还出现了独特的强度响应。这种慢光可以为硅光子学增添各种功能,同时为确保慢光的优势,需要降低损耗。

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