Snapshot phase sensitive scatterometry based on double-channel spectral carrier frequency concept.

Spectroscopic ellipsometry is one of the most important measurement schemes used in the optical nano-metrology for not only thin film measurement but also nano pattern 3D structure measurement. In this paper, we propose a novel snap shot phase sensitive normal incidence spectroscopic ellipsometic scheme based on a double-channel spectral carrier frequency concept. The proposed method can provide both Ψ(λ) and Δ(λ) only by using two spectra acquired simultaneously through the double spectroscopic channels. We show that the proposed scheme works well experimentally by measuring a binary grating with nano size 3D structure. We claim that the proposed scheme can provide a snapshot spectroscopic ellipsometric parameter measurement capability with moderate accuracy.