Kim Daesuk, Kim Hyunsuk, Magnusson Robert, Cho Yong Jai, Chegal Won, Cho Hyun Mo
Division of Mechanical System Engineering, Chonbuk National University, 664-14 Duckjin-dong, Duckjin-gu, Jeonju 561-756, South Korea.
Opt Express. 2011 Nov 21;19(24):23790-9. doi: 10.1364/OE.19.023790.
Spectroscopic ellipsometry is one of the most important measurement schemes used in the optical nano-metrology for not only thin film measurement but also nano pattern 3D structure measurement. In this paper, we propose a novel snap shot phase sensitive normal incidence spectroscopic ellipsometic scheme based on a double-channel spectral carrier frequency concept. The proposed method can provide both Ψ(λ) and Δ(λ) only by using two spectra acquired simultaneously through the double spectroscopic channels. We show that the proposed scheme works well experimentally by measuring a binary grating with nano size 3D structure. We claim that the proposed scheme can provide a snapshot spectroscopic ellipsometric parameter measurement capability with moderate accuracy.
光谱椭偏测量法是光学纳米计量学中最重要的测量方法之一，不仅用于薄膜测量，还用于纳米图案三维结构测量。在本文中，我们基于双通道光谱载波频率概念提出了一种新型的快照相位敏感正入射光谱椭偏测量方案。所提出的方法仅通过使用通过双光谱通道同时采集的两个光谱就能提供Ψ(λ)和Δ(λ)。我们通过测量具有纳米尺寸三维结构的二元光栅表明，所提出的方案在实验中效果良好。我们声称，所提出的方案能够以适度的精度提供快照光谱椭偏参数测量能力。
