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千兆赫兹表面声波的光束畸变检测与偏转测量

Beam distortion detection and deflectometry measurements of gigahertz surface acoustic waves.

作者信息

Higuet Julien, Valier-Brasier Tony, Dehoux Thomas, Audoin Bertrand

机构信息

Département d'Acoustique Physique, Université de Bordeaux, CNRS, UMR 5295, I2M, Talence F-33405, France.

出版信息

Rev Sci Instrum. 2011 Nov;82(11):114905. doi: 10.1063/1.3660193.

Abstract

Gigahertz acoustic waves propagating on the surface of a metal halfspace are detected using different all-optical detection schemes, namely, deflectometry and beam distortion detection techniques. Both techniques are implemented by slightly modifying a conventional reflectometric setup. They are then based on the measurement of the reflectivity change but unlike reflectometric measurements, they give access to the sample surface displacement. A semi-analytical model, taking into account optical, thermal, and mechanical processes responsible for acoustic waves generation, allows analyzing the physical content of the detected waveforms.

摘要

利用不同的全光学检测方案,即偏转测量法和光束畸变检测技术,来检测在金属半空间表面传播的千兆赫兹声波。这两种技术都是通过对传统反射测量装置进行轻微修改来实现的。它们基于反射率变化的测量,但与反射测量不同的是,它们能够获取样品表面位移。一个考虑了负责声波产生的光学、热学和力学过程的半解析模型,有助于分析检测到的波形的物理内容。

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