CEIT and Tecnun, University of Navarra, Manuel de Lardizábal 15, 20018 San Sebastian, Spain.
Sensors (Basel). 2011;11(5):5047-57. doi: 10.3390/s110505047. Epub 2011 May 5.
Carbon dioxide detection is a relevant issue in many fields, and this work focuses on the use of a BaTiO(3)-CuO sputtered thin film layer in a gas sensor prototype for air quality measurements. For this, a double side sensor was fabricated, with a Pt heater on one side and the sensing layer over the electrodes on the other side. The uniformity of the temperature on the sensing layer was tested and further tests to check its sensing performance were carried out. Humidity influence in the detection was found to be almost negligible within the usual range in air quality measurements and repeatability tests show satisfactory results for air quality control purposes.
二氧化碳检测在许多领域都是一个相关问题,本工作重点研究了在空气质量测量用的气体传感器原型中使用 BaTiO(3)-CuO 溅射薄膜层。为此,制备了双面传感器,一侧为 Pt 加热器,另一侧为电极上的传感层。测试了传感层上温度的均匀性,并进一步进行了检查其传感性能的测试。发现湿度对检测的影响在空气质量测量的通常范围内几乎可以忽略不计,而重复性测试结果对于空气质量控制目的令人满意。