Pavliček Pavel, Hýbl Ondřej
Palacky University, Faculty of Science, Regional Centre of Advanced Technologies and Materials, Joint Laboratory of Optics of Palacky University and Institute of Physics of Academy of Science of the Czech Republic, Olomouc, Czech Republic.
Appl Opt. 2012 Feb 1;51(4):465-73. doi: 10.1364/AO.51.000465.
White-light interferometry on rough surfaces is an optical method for the measurement of the geometrical form of objects. The longitudinal coordinate of the measured surface is obtained from the measured interferogram by means of an evaluation method. However, the longitudinal coordinate cannot be determined completely accurately because the interferogram is affected by noise. We calculate the lower limit of the longitudinal measurement uncertainty caused by noise by use of the Cramer-Rao inequality. Additionally, we calculate the lower limit of the longitudinal measurement uncertainty caused by shot noise only.
粗糙表面上的白光干涉测量法是一种用于测量物体几何形状的光学方法。通过一种评估方法从测量得到的干涉图中获取被测表面的纵向坐标。然而，因为干涉图受到噪声影响，纵向坐标无法被完全精确地确定。我们利用克拉美-罗不等式计算由噪声引起的纵向测量不确定度的下限。此外，我们仅计算由散粒噪声引起的纵向测量不确定度的下限。
