Takenaka T, Kiriyama R, Muramatsu M, Kitagawa A, Uchida T, Kurisu Y, Nozaki D, Yano K, Yoshida Y, Sato F, Kato Y, Iida T
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University 2-1 Yamada-oka, Suita-shi, Osaka 565-0871, Japan.
Rev Sci Instrum. 2012 Feb;83(2):02A327. doi: 10.1063/1.3669798.
An electron cyclotron resonance ion source (ECRIS) is used to generate multicharged ions for many kinds of the fields. We have developed an evaporator by using induction heating method that can generate pure vapor from solid state materials in ECRIS. We develop the new matching and protecting circuit by which we can precisely control the temperature of the induction heating evaporator. We can control the temperature within ±15 °C around 1400 °C under the operation pressure about 10(-4) Pa. We are able to use this evaporator for experiment of synthesizing process to need pure vapor under enough low pressure, e.g., experiment of generation of endohedral Fe-fullerene at the ECRIS.
电子回旋共振离子源（ECRIS）被用于为多种领域生成多电荷离子。我们已经开发出一种采用感应加热方法的蒸发器，它能够在电子回旋共振离子源中从固态材料产生纯蒸汽。我们研发了新的匹配和保护电路，通过该电路我们可以精确控制感应加热蒸发器的温度。在约10⁻⁴ 帕的运行压力下，我们能够在1400 °C左右将温度控制在±15 °C范围内。我们能够将这种蒸发器用于在足够低的压力下需要纯蒸汽的合成过程实验，例如在电子回旋共振离子源中生成内嵌铁富勒烯的实验。
