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通过三维金刚石微铣削制造用于阵列显微镜的塑料微透镜阵列

Fabrication of plastic microlens array for array microscopy by three-dimensional diamond micromilling.

作者信息

McCall Brian, Tkaczyk Tomasz S

机构信息

Rice University Department of Bioengineering Houston, Texas 77030.

出版信息

Opt Eng. 2010 Oct 27;49(10):103401. doi: 10.1117/1.3497567.

Abstract

Two lens arrays of 20 lenses (4×5) are fabricated in polystyrene (Rexolite 1422) using a 3-D, three-axis micromilling process. The lenses of one array are concave (R(curv) = -2 mm) and the lenses of the other array are convex (R(curv) = 2 mm). A method for correcting a 3-D micromilling program for a single lens is described and evaluated. The lens separation is 4 mm and Ø(diam) = 2.6 mm for all lenses. Based on a measurement of key optical parameters (radius error, wavefront error, and surface roughness), micromilled lenses are shown to be of high optical quality compared with the form error and surface roughness obtained with plastic injection molded lenses.

摘要

使用三维三轴微铣削工艺在聚苯乙烯(Rexolite 1422)中制造了两个由20个透镜组成的透镜阵列(4×5)。其中一个阵列的透镜是凹透镜(曲率半径R(curv) = -2毫米),另一个阵列的透镜是凸透镜(曲率半径R(curv) = 2毫米)。描述并评估了一种用于单个透镜的三维微铣削程序校正方法。所有透镜的透镜间距为4毫米,直径Ø(diam) = 2.6毫米。基于关键光学参数(半径误差、波前误差和表面粗糙度)的测量,与注塑成型透镜所获得的形状误差和表面粗糙度相比,微铣削透镜显示出具有高光学质量。

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