Nanotechnology on Surfaces Laboratory, Materials Science Institute of Seville, CSIC-University of Seville, C/Americo Vespucio 49, Seville, Spain.
Nanotechnology. 2012 Jun 29;23(25):255303. doi: 10.1088/0957-4484/23/25/255303. Epub 2012 May 31.
Supported ZnO nanorods have been prepared at 405 K by plasma-enhanced chemical vapour deposition (PECVD) using diethylzinc as precursor, oxygen plasma and silver as the promotion layer. The nanorods are characterized by a hollow and porous microstructure where partially percolated silver nanoparticles are located. By changing different deposition parameters like the thickness of the silver layer, the type of oxidation pretreatment or the geometry of the deposition set-up, the length, the width and the tilting angle of the nanorods with respect to the substrate can be modified. Other nanostructures like nanobushes, zigzag linear structures and stacked bilayers with nanocolumns of TiO(2) can also be prepared by adjusting the deposition conditions. A phenomenological model relying on the assessment of the diverse nanostructure morphologies and the evidence provided by an in situ x-ray photoelectron spectroscopy (XPS) experiment has been proposed to describe their formation mechanism. From this analysis it is deduced that the effect of the electrical field of the plasma sheath, the high mobility of silver and silver oxide, and the diffusion of the precursor molecules are some of the critical factors that must converge by the formation of the nanorods.
采用等离子体增强化学气相沉积（PECVD）法，以二乙基锌（diethylzinc）为前驱体、氧气等离子体和银作为促进层，于 405 K 下制备了负载型 ZnO 纳米棒。纳米棒具有中空多孔的微观结构，部分渗透的银纳米颗粒位于其中。通过改变沉积参数，如银层的厚度、氧化预处理的类型或沉积装置的几何形状，可以改变纳米棒相对于衬底的长度、宽度和倾斜角度。通过调整沉积条件，还可以制备出其他纳米结构，如纳米束、锯齿状线性结构以及具有 TiO(2)纳米柱的堆叠双层结构。提出了一种基于对各种纳米结构形貌的评估以及原位 X 射线光电子能谱（XPS）实验所提供的证据的唯象模型，以描述其形成机制。从该分析中可以推断，等离子体鞘的电场、银和氧化银的高迁移率以及前体分子的扩散是形成纳米棒所需的一些关键因素。
