Manojlović Lazo M, Zivanov Miloš B, Slankamenac Miloš P, Bajić Jovan S, Stupar Dragan Z
Zrenjanin Technical College, Đorđa Stratimirovića 23, 23000 Zrenjanin, Serbia. lazo.manojlovic@vts‐zr.edu.rs
Appl Opt. 2012 Jul 1;51(19):4333-42. doi: 10.1364/AO.51.004333.
A novel high-speed and high-sensitivity displacement measurement sensing system, based on the phase-locked low-coherence interferometry, is presented. The sensing system is realized by comprising the Michelson fiber-optic interferometer. In order to obtain quadrature signals at the interferometer outputs, a 3×3 fused silica fiber-optic directional coupler is used. Therefore, the usage of the interferometer phase modulation as well as the usage of the lock-in amplification has been avoided. In this way, the speed of such a realized sensing system is significantly increased in comparison with the standard phase-locked interferometric systems that can be found elsewhere in the literature. The bandwidth of the realized sensing system is limited by the first resonance frequency of the used piezo actuator to 4.6 kHz. The estimated noise floor in the displacement measurement is approximately 180 pm/√Hz.
提出了一种基于锁相低相干干涉测量法的新型高速高灵敏度位移测量传感系统。该传感系统通过包含迈克尔逊光纤干涉仪来实现。为了在干涉仪输出端获得正交信号，使用了一个3×3熔融石英光纤定向耦合器。因此，避免了干涉仪相位调制的使用以及锁相放大的使用。这样，与文献中其他地方可以找到的标准锁相干涉测量系统相比，这种实现的传感系统的速度显著提高。所实现的传感系统的带宽受所用压电致动器的第一共振频率限制，为4.6 kHz。位移测量中的估计本底噪声约为180 pm/√Hz。
