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工程化生长在 Au 涂层 Si 衬底上的 ultrananocrystalline diamond 薄膜的界面特性。

Engineering the interface characteristics of ultrananocrystalline diamond films grown on Au-coated Si substrates.

机构信息

Department of Materials Science and Engineering, National Tsing-Hua University, Hsinchu 300, Taiwan, Republic of China.

出版信息

ACS Appl Mater Interfaces. 2012 Aug;4(8):4169-76. doi: 10.1021/am300894u. Epub 2012 Jul 31.

Abstract

Enhanced electron field emission (EFE) properties have been observed for ultrananocrystalline diamond (UNCD) films grown on Au-coated Si (UNCD/Au-Si) substrates. The EFE properties of UNCD/Au-Si could be turned on at a low field of 8.9 V/μm, attaining EFE current density of 4.5 mA/cm(2) at an applied field of 10.5 V/μm, which is superior to that of UNCD films grown on Si (UNCD/Si) substrates with the same chemical vapor deposition process. Moreover, a significant difference in current-voltage curves from scanning tunneling spectroscopic measurements at the grain and the grain boundary has been observed. From the variation of normalized conductance (dI/dV)/(I/V) versus V, bandgap of UNCD/Au-Si is measured to be 2.8 eV at the grain and nearly metallic at the grain boundary. Current imaging tunneling spectroscopy measurements show that the grain boundaries have higher electron field emission capacity than the grains. The diffusion of Au into the interface layer that results in the induction of graphite and converts the metal-to-Si interface from Schottky to Ohmic contact is believed to be the authentic factors, resulting in marvelous EFE properties of UNCD/Au-Si.

摘要

在金覆盖硅(UNCD/Au-Si)衬底上生长的超细晶金刚石(UNCD)薄膜表现出增强的电子场发射(EFE)性能。UNCD/Au-Si 的 EFE 特性可以在低场 8.9 V/μm 下开启,在 10.5 V/μm 的外加电场下达到 4.5 mA/cm²的 EFE 电流密度,优于具有相同化学气相沉积工艺的在 Si(UNCD/Si)衬底上生长的 UNCD 薄膜。此外,在晶粒和晶界的扫描隧道光谱测量中观察到电流-电压曲线的显著差异。从归一化电导 (dI/dV)/(I/V) 随 V 的变化来看,UNCD/Au-Si 的能隙在晶粒处测量为 2.8 eV,在晶界处几乎为金属。电流成像隧道谱测量表明,晶界的电子场发射能力高于晶粒。Au 向界面层的扩散导致石墨的诱导,并将金属-Si 界面从肖特基接触转变为欧姆接触,这被认为是导致 UNCD/Au-Si 出色 EFE 性能的真实因素。

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