Wu Xuejian, Zhang Jitao, Wei Haoyun, Li Yan
State Key Lab of Precision Measurement Technology & Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China.
Rev Sci Instrum. 2012 Jul;83(7):073107. doi: 10.1063/1.4737625.
We present a phase-shifting interferometer based on a frequency-tunable diode laser calibrated by an optical frequency comb and the Carré algorithm. By use of the frequency control strategies of locking the diode laser to different comb modes and scanning the repetition rate, an arbitrary single optical frequency synthesizer is obtained. The relative laser frequency uncertainty is 5.7 × 10(-12) for 1 s averaging time with tracing to an Rb clock and accurate phase steps are achieved by optical frequency tuning. The surface topography of a standard sphere is measured by this phase-shifting interferometer based on a flat reference. The phase measurement repeatability is λ/200. With this technique, phase measurement uncertainties from the laser frequency and phase steps are negligible.
我们展示了一种基于由光学频率梳和卡雷算法校准的频率可调谐二极管激光器的相移干涉仪。通过使用将二极管激光器锁定到不同梳状模式并扫描重复率的频率控制策略，获得了任意单光频合成器。在追溯到铷钟的情况下，对于1秒的平均时间，相对激光频率不确定度为5.7×10^(-12)，并且通过光频调谐实现了精确的相位步长。基于平面参考，用这种相移干涉仪测量了标准球体的表面形貌。相位测量重复性为λ/200。利用该技术，来自激光频率和相位步长的相位测量不确定度可忽略不计。
