Department of Chemistry, Northwestern University, Evanston, Illinois 60208, United States.
Nano Lett. 2012 Sep 12;12(9):4948-52. doi: 10.1021/nl302535p. Epub 2012 Aug 17.
This paper describes a new nanofabrication method, moiré nanolithography, that can fabricate subwavelength lattices with high-rotational symmetries. By exposing elastomeric photomasks sequentially at multiple offset angles, we created arrays with rotational symmetries as high as 36-fold, which is three times higher than quasiperiodic lattices (≤12-fold) and six times higher than two-dimensional periodic lattices (≤6-fold). Because these moiré nanopatterns can be generated over wafer-scale areas, they are promising for a range of photonic applications, especially those that require broadband, omnidirectional absorption of visible light.
本文描述了一种新的纳米制造方法——莫尔纳米光刻技术，该技术可以制造具有高旋转对称性的亚波长晶格。通过在多个偏移角度下依次曝光弹性体光掩模，我们制造出了具有高达 36 重旋转对称性的阵列，比准周期晶格（≤12 重）高 3 倍，比二维周期晶格（≤6 重）高 6 倍。由于这些莫尔纳米图案可以在晶圆级大面积上生成，因此它们在各种光子应用中具有广阔的应用前景，特别是那些需要宽带、全方位可见光吸收的应用。
