Department of Photonics Engineering, Technical University of Denmark, DTU Fotonik, Kongens Lyngby, Denmark.
Nanotechnology. 2012 Sep 28;23(38):385306. doi: 10.1088/0957-4484/23/38/385306. Epub 2012 Sep 5.
We exploit the localized surface-plasmon resonance (LSPR) of terahertz gold gammadion structures for wafer scale critical dimension metrology of nanostructures. The proposed characterization method, LSPR spectroscopy, is based on optical transmission measurements and is benchmarked against numerical simulations of imprinted structures characterized by atomic force microscopy. There is a fair agreement between the two methods and the simulations enable the translation of optical spectra to critical dimensions of the physical structures, a concept known from scatterometry. The results demonstrate the potential of LSPR spectroscopy as an alternative characterization method to scanning electron microscopy, atomic force microscopy and scatterometry.
我们利用太赫兹金“十”字结构的局域表面等离子体共振（LSPR），实现了纳米结构的晶圆级关键尺寸计量。所提出的特征化方法，即 LSPR 光谱学，基于光学透射测量，并与原子力显微镜（AFM）表征的压印结构的数值模拟进行了基准测试。这两种方法之间存在着很好的一致性，并且这些模拟能够将光学光谱转换为物理结构的关键尺寸，这一概念来源于散射测量学。研究结果表明，LSPR 光谱学作为扫描电子显微镜、原子力显微镜和散射测量学的替代特征化方法具有潜力。
