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基于微机电系统平台上集成的纳米结构薄膜的空气质量监测无线单元的长期户外可靠性评估。

Long-term outdoor reliability assessment of a wireless unit for air-quality monitoring based on nanostructured films integrated on micromachined platforms.

机构信息

Tethis spa, via Russoli 3, Milano 20143, Italy.

出版信息

Sensors (Basel). 2012;12(6):8176-92. doi: 10.3390/s120608176. Epub 2012 Jun 13.

Abstract

We have fabricated and tested in long-term field operating conditions a wireless unit for outdoor air quality monitoring. The unit is equipped with two multiparametric sensors, one miniaturized thermo-hygrometer, front-end analogical and digital electronics, and an IEEE 802.15.4 based module for wireless data transmission. Micromachined platforms were functionalized with nanoporous metal-oxides to obtain multiparametric sensors, hosting gas-sensitive, anemometric and temperature transducers. Nanoporous metal-oxide layer was directly deposited on gas sensing regions of micromachined platform batches by hard-mask patterned supersonic cluster beam deposition. An outdoor, roadside experiment was arranged in downtown Milan (Italy), where one wireless sensing unit was continuously operated side by side with standard gas chromatographic instrumentation for air quality measurements. By means of a router PC, data from sensing unit and other instrumentation were collected, merged, and sent to a remote data storage server, through an UMTS device. The whole-system robustness as well as sensor dataset characteristics were continuously characterized over a run-time period of 18 months.

摘要

我们已经制造并在长期野外运行条件下测试了一个用于户外空气质量监测的无线单元。该单元配备了两个多参数传感器、一个微型温湿度计、前端模拟和数字电子设备,以及一个基于 IEEE 802.15.4 的无线数据传输模块。微加工平台经过功能化处理,采用纳米多孔金属氧化物,获得多参数传感器,其中包括气体敏感、风速和温度传感器。纳米多孔金属氧化物层通过硬掩模图案化超音速团束沉积直接沉积在微加工平台批次的气体敏感区域上。在意大利米兰市中心安排了一个户外路边实验,其中一个无线感应单元与标准气相色谱仪器并排连续运行,用于空气质量测量。通过路由器 PC,可以收集、合并来自感应单元和其他仪器的的数据,并通过 UMTS 设备发送到远程数据存储服务器。在 18 个月的运行时间内,对整个系统的稳健性以及传感器数据集的特征进行了连续表征。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1f28/3436023/eae33907907d/sensors-12-08176f1.jpg

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