Boudreault O, Mattei S, Stafford L, Margot J, Moisan M, Khare R, Donnelly V M
Département de Physique, Université de Montréal, Montréal, Québec, Canada H3C 3J7.
Phys Rev E Stat Nonlin Soft Matter Phys. 2012 Jul;86(1 Pt 2):015402. doi: 10.1103/PhysRevE.86.015402. Epub 2012 Jul 19.
Spatially resolved trace rare gases optical emission spectroscopy was used to analyze the electron energy-distribution function (EEDF) in low-pressure argon plasma columns sustained by surface waves. At frequencies >1 GHz, in the microwave-sustained region, the EEDF departs from a Maxwellian, characterized by a depletion of low-energy electrons and a high-energy tail, whereas in the field-free zone, the EEDF is Maxwellian. Abnormal behavior of the EEDF results from the acceleration of low-energy electrons due to the conversion of surface waves into volume plasmons at the resonance point where the plasma frequency equals the wave frequency and their absorption by either collisional or Landau damping.
利用空间分辨痕量稀有气体发射光谱法分析了表面波维持的低压氩等离子体柱中的电子能量分布函数（EEDF）。在频率大于1GHz时，在微波维持区域，EEDF偏离麦克斯韦分布，其特征是低能电子耗尽和高能尾部，而在无场区，EEDF是麦克斯韦分布。EEDF的异常行为是由于在等离子体频率等于波频率的共振点处表面波转换为体等离子体时低能电子的加速以及它们通过碰撞阻尼或朗道阻尼的吸收。
