Department of Environmental Engineering, Chonbuk National University, 567 Bakje-daero, Deokjin-Gu, Jeonju, Jeollabuk-Do, 561-756, South Korea.
J Hazard Mater. 2012 Nov 15;239-240:110-7. doi: 10.1016/j.jhazmat.2012.08.004. Epub 2012 Aug 10.
The treatment of hydrofluoric acid (HF) wastewater has been an important environmental issue in recent years due to the extensive use of hydrofluoric acid in the chemical and electronics industries, such as semiconductor manufacturers. Coagulation/precipitation and ion exchange technologies have been used to treat HF wastewater, but these conventional methods are ineffective in removing organics, salts, and fluorides, limiting its reuse for water quality and economic feasibility. One promising alternative is reverse osmosis (RO) after lime treatment. Based on pilot-scale experiment using real HF wastewater discharged from semiconductor facility, the spiral wound module equipped with polyamide membranes has shown excellent flux and chemical cleaning cycles. Our results suggest that coagulation/precipitation and spiral wound RO constitute the optimal combination to reuse HF wastewater.
近年来，由于氢氟酸（HF）在化工和电子等行业（如半导体制造商）的广泛应用，HF 废水的处理已成为一个重要的环境问题。混凝/沉淀和离子交换技术已被用于处理 HF 废水，但这些传统方法在去除有机物、盐和氟化物方面效果不佳，限制了其再用于水质和经济可行性。反渗透（RO）在石灰处理后的应用是一种很有前景的替代方法。基于使用半导体设施排放的实际 HF 废水进行的中试实验，配备聚酰胺膜的螺旋缠绕模块表现出优异的通量和化学清洗周期。我们的结果表明，混凝/沉淀和螺旋缠绕 RO 构成了再利用 HF 废水的最佳组合。
