Ding Yunhong, Liu Liu, Peucheret Christophe, Ou Haiyan
DTU-Fotonik, Technical University of Denmark, Ørsteds Plads, Building 343, 2800 Kgs. Lyngby, Denmark.
Opt Express. 2012 Aug 27;20(18):20021-7. doi: 10.1364/OE.20.020021.
A polarization splitter and rotator (PSR) based on a tapered directional coupler with relaxed fabrication tolerance is proposed and demonstrated on the silicon-on-insulator platform. The device is simply constructed by parallel-coupling a narrow silicon waveguide with a linearly tapered wider waveguide. Compared to previously reported PSRs based on a normal directional coupler, which suffer from stringent requirements on the accuracy of the narrow waveguide width, the introduced tapered structure of the wide waveguide can be used to compensate the fabrication errors of the narrow waveguide. In addition, only a single step of exposure and etching is needed for the fabrication of the device. Similar high conversion efficiencies are experimentally demonstrated for a narrow waveguide width deviation of 14 nm with large tolerance to the coupler length.
提出了一种基于具有宽松制造公差的锥形定向耦合器的偏振分束器和旋转器(PSR),并在绝缘体上硅平台上进行了演示。该器件通过将窄硅波导与线性锥形宽波导平行耦合而简单构建。与先前报道的基于普通定向耦合器的PSR相比,后者对窄波导宽度的精度有严格要求,而引入的宽波导锥形结构可用于补偿窄波导的制造误差。此外,该器件的制造仅需一步曝光和蚀刻。实验证明,对于14 nm的窄波导宽度偏差,该器件具有相似的高转换效率,并且对耦合器长度具有较大的容差。