Zou Yun, Shen Zhenhua, Chen Xiang, Di Ziyun, Chen Xianfeng
Department of Physics, Shanghai Jiao Tong University, Shanghai 200240, China.
Opt Express. 2012 Aug 13;20(17):18931-6. doi: 10.1364/OE.20.018931.
We demonstrated an integrated tunable interferometer in Polydimethylsiloxane (PDMS). In contrast to most on-chip interferometers which require complex fabrication, our design is realized by conventional soft lithography fabrication. The optical path difference occurs during propagation across a fluid-fluid interface. The diffusion level of the two miscible liquids which is controlled by liquid flow rates provides tunability. Different ratio of two liquid flow rates result in the interference spectral shift. Interference peak numbers are varied with flow rate ratio of two liquids. Mutual diffusion between two liquids changes the profile of the refractive index across the fluidic channel. The two arms structure of our design provides convenience for sensing and detection in biology system. This device not only offers the convenience for microfluidic networks but also paves the way for sensing in chemical microreactors.
我们展示了一种集成在聚二甲基硅氧烷（PDMS）中的可调谐干涉仪。与大多数需要复杂制造工艺的片上干涉仪不同，我们的设计是通过传统的软光刻制造工艺实现的。光程差在流体 - 流体界面传播过程中产生。由液体流速控制的两种互溶液体的扩散水平提供了可调性。两种液体流速的不同比例导致干涉光谱发生偏移。干涉峰的数量随两种液体的流速比而变化。两种液体之间的相互扩散改变了流体通道中折射率的分布。我们设计的双臂结构为生物系统中的传感和检测提供了便利。该设备不仅为微流体网络提供了便利，也为化学微反应器中的传感铺平了道路。
