Improving the scanning speed of atomic force microscopy at the scanning range of several tens of micrometers.

The atomic force microscope (AFM) is a powerful instrument which can measure the surface of samples at the nanoscale. The resonance of the scanner in xy directions, and the feedback control in the z direction are two major sources of image distortion at high scan speed. In order to improve the scanning speed of the AFM, a low-cost and easy method, which includes sinusoidal scans in the fast scan direction, and an intelligent fuzzy controller in the z direction, is proposed in this paper. The use of a single-frequency driving signal in the fast scan direction allows the scanner to move at a higher speed without exciting its mechanical resonance. The intelligent fuzzy controller automatically selects appropriate PI parameters through the analysis of the tracking errors, thus improving the dynamic tracking performance of the z scanner. The development and functioning of the sinusoidal fast scans and the intelligent fuzzy controller are demonstrated, as well as how this approach significantly achieves faster scans and a higher resolution AFM imaging.