使用叠层成像术的纳米级菲涅耳相干衍射成像断层扫描

Nanoscale Fresnel coherent diffraction imaging tomography using ptychography.

作者信息

Peterson I, Abbey B, Putkunz C T, Vine D J, van Riessen G A, Cadenazzi G A, Balaur E, Ryan R, Quiney H M, McNulty I, Peele A G, Nugent K A

机构信息

School of Physics, University of Melbourne, Victoria 3010, Australia.

出版信息

Opt Express. 2012 Oct 22;20(22):24678-85. doi: 10.1364/OE.20.024678.

DOI:10.1364/OE.20.024678

PMID:23187230

Abstract

We demonstrate Fresnel Coherent Diffractive Imaging (FCDI) tomography in the X-ray regime. The method uses an incident X-ray illumination with known curvature in combination with ptychography to overcome existing problems in diffraction imaging. The resulting tomographic reconstruction represents a 3D map of the specimen's complex refractive index at nano-scale resolution. We use this technique to image a lithographically fabricated glass capillary, in which features down to 70nm are clearly resolved.

摘要

我们展示了X射线波段的菲涅耳相干衍射成像（FCDI）断层扫描技术。该方法将具有已知曲率的入射X射线照明与叠层成像术相结合，以克服衍射成像中的现有问题。由此产生的断层重建图像呈现出纳米级分辨率下样本复折射率的三维图谱。我们使用这项技术对光刻制造的玻璃毛细管进行成像，其中低至70纳米的特征清晰可辨。