一种带有压电陶瓷（PZT）驱动器的新型两轴微机电系统（MEMS）扫描镜，用于激光扫描投影。

A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection.

作者信息

Chen Chung-De, Wang Yu-Jen, Chang Pin

机构信息

Industrial Technology Research Institute No. 31, Annan District, Tainan, Taiwan.

出版信息

Opt Express. 2012 Nov 19;20(24):27003-17. doi: 10.1364/OE.20.027003.

DOI:10.1364/OE.20.027003

PMID:23187556

Abstract

This study presents a novel design for a two-axis scanning device driven by lead-zirconate-titanate (PZT) ceramic. The proposed device consists of a scanning mirror and a Y-shaped piezoelectric actuator. The scanning mirror was fabricated using an MEMS process involving three masks. Experimental results show that the fast and slow frequencies at resonance are 25.0 kHz and 0.56 kHz, respectively. The optical scanning angles are 27.6° and 39.9°. The power consumption of the device is 13.4 mW at a driving voltage of 10 V. This study also develops a laser projection module integrated with the scanning device. The module can project a 2-D image at a resolution of 640 x 480.

摘要

本研究提出了一种由锆钛酸铅（PZT）陶瓷驱动的新型两轴扫描装置设计。所提出的装置由一个扫描镜和一个Y形压电致动器组成。扫描镜采用涉及三个掩膜的微机电系统（MEMS）工艺制造。实验结果表明，共振时的快频率和慢频率分别为25.0 kHz和0.56 kHz。光学扫描角度为27.6°和39.9°。在10 V驱动电压下，该装置的功耗为13.4 mW。本研究还开发了一种与扫描装置集成的激光投影模块。该模块可以以640×480的分辨率投影二维图像。