State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China.
Sensors (Basel). 2010;10(7):6848-60. doi: 10.3390/s100706848. Epub 2010 Jul 16.
A two-dimensional (2D) scanning micro-mirror for target detection and measurement has been developed. This new micro-mirror is used in a MOEMS target detector to replace the conventional scanning detector. The micro-mirror is fabricated by MEMS process and actuated by a piezoelectric actuator. To achieve large deflection angles, the micro-mirror is excited in the resonance modes. It has two degrees of freedom and changes the direction of the emitted laser beam for a regional 2D scanning. For the deflection angles measurement, piezoresistors are integrated in the micro-mirror and the deflection angles of each direction can be detected independently and precisely. Based on the scanning micro-mirror and the phase-shift ranging technology, a MOEMS target detector has been developed in a size of 90 mm × 35 mm × 50 mm. The experiment shows that the target can be detected in the scanning field and the relative range and orientation can be measured by the MOEMS target detector. For the target distance up to 3 m with a field of view about 20° × 20°, the measurement resolution is about 10.2 cm in range, 0.15° in the horizontal direction and 0.22° in the vertical direction for orientation.
已经开发出一种用于目标检测和测量的二维（2D）扫描微镜。这种新的微镜用于 MOEMS 目标探测器，以取代传统的扫描探测器。微镜由 MEMS 工艺制造，由压电致动器驱动。为了实现大的偏转角，微镜在共振模式下被激励。它有两个自由度，用于区域 2D 扫描改变发射激光束的方向。为了测量偏转角，微镜中集成了压阻式传感器，可以独立且精确地检测每个方向的偏转角。基于扫描微镜和相移测距技术，已经开发出一种尺寸为 90mm×35mm×50mm 的 MOEMS 目标探测器。实验表明，在扫描场中可以检测到目标，并且可以通过 MOEMS 目标探测器测量相对距离和方位。对于距离达 3m、视场约 20°×20°的目标，距离测量分辨率约为 10.2cm，水平方向的方位测量分辨率为 0.15°，垂直方向的方位测量分辨率为 0.22°。
