Brandstetter M, Deutsch C, Benz A, Cole G D, Detz H, Andrews A M, Schrenk W, Strasser G, Unterrainer K
Photonics Institute and Center for Micro- and Nanostructures, Vienna University of Technology, Gusshausstrasse 29, A-1040 Vienna, Austria.
Opt Express. 2012 Oct 8;20(21):23832-7. doi: 10.1364/OE.20.023832.
We demonstrate terahertz quantum-cascade lasers with a 30 μm thick double-metal waveguide, which are fabricated by stacking two 15 μm thick active regions using a wafer bonding process. By increasing the active region thickness more optical power is generated inside the cavity, the waveguide losses are decreased and the far-field is improved due to a larger facet aperture. In this way the output power is increased by significantly more than a factor of 2 without reducing the maximum operating temperature and without increasing the threshold current.
我们展示了采用30μm厚双金属波导的太赫兹量子级联激光器，其通过晶圆键合工艺堆叠两个15μm厚的有源区来制造。通过增加有源区厚度，腔内产生了更多的光功率，由于更大的刻面孔径，波导损耗降低，远场得到改善。通过这种方式，输出功率显著提高了两倍多，而没有降低最高工作温度，也没有增加阈值电流。
