Arhab S, Giovannini H, Belkebir K, Soriano G
Institut Fresnel (CNRS UMR 7249), Aix-Marseille Université, Campus de St Jérôme, 13013 Marseille, France.
J Opt Soc Am A Opt Image Sci Vis. 2012 Aug 1;29(8):1508-15. doi: 10.1364/JOSAA.29.001508.
Optical digital tomographic microscopy can be used for profilometry. The profile of the surface can be estimated from measurements of the complex diffracted far field obtained when the sample is illuminated successively under various incidences. Outside the validity domain of perturbative theories of diffraction, the profile is determined by using an iterative inverse wave scattering numerical method. In this paper we show that, for perfectly conducting surfaces, the two fundamental polarization cases involve different distances of interaction in the multiple scattering phenomenon. The use of both polarization cases in the inversion process leads to a considerable improvement of the lateral resolution. Robustness to noise is also discussed.
光学数字断层显微镜可用于轮廓测量。当样品在不同入射角下依次被照射时，通过对获得的复衍射远场进行测量，可以估计表面轮廓。在衍射微扰理论的有效域之外，通过使用迭代逆波散射数值方法来确定轮廓。在本文中，我们表明，对于理想导电表面，两种基本偏振情况在多重散射现象中涉及不同的相互作用距离。在反演过程中使用这两种偏振情况会显著提高横向分辨率。还讨论了对噪声的鲁棒性。
