Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, 612 64 Brno, Czech Republic.
Sensors (Basel). 2012 Oct 19;12(10):14084-94. doi: 10.3390/s121014084.
We present an interferometric technique based on a differential interferometry setup for measurement under atmospheric conditions. The key limiting factor in any interferometric dimensional measurement are fluctuations of the refractive index of air representing a dominating source of uncertainty when evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of an over-determined interferometric setup where a reference length is derived from a mechanical frame made from a material with a very low thermal coefficient. The technique allows one to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third evaluates the changes in the measuring range, acting as a tracking refractometer. The principle is demonstrated in an experimental setup.
我们提出了一种基于差分干涉仪设置的干涉技术,用于在大气条件下进行测量。在任何干涉式尺寸测量中,关键的限制因素是空气折射率的波动,当从大气的物理参数间接评估时,它代表了一个主要的不确定源。我们的方案基于超定干涉仪设置的概念,其中参考长度来自由热膨胀系数非常低的材料制成的机械框架。该技术允许在线直接在测量光束的线上跟踪空气折射率的变化,并对其波动进行补偿。光学设置由三个共享相同光路的干涉仪组成,其中两个干涉仪差分测量位移,而第三个干涉仪评估测量范围的变化,充当跟踪折射计。该原理在实验设置中得到了验证。