Department of Materials Science and Engineering, National Cheng Kung University, Tainan, Taiwan.
ACS Appl Mater Interfaces. 2013 Jan;5(1):120-7. doi: 10.1021/am302287q. Epub 2012 Dec 14.
Energetic-assisted scanning thermal lithography (SThL) was demonstrated with the addition of benzoyl peroxide (BPO) for patterning silver nanoparticles. SThL samples were prepared by spin-coating poly(methyl methacrylate) (PMMA) thin films preloaded with BPO and silver nitrate precursors. Localized thermal analysis via probe heating demonstrated that the BPO decomposition in the polymer film took place at the temperature of 80 °C. Above this temperature, the thermal probe initiated the decomposition of the peroxide, which resulted in the in situ discharge of exothermal energy to compensate the joule shortage and the rapid cooling in the SThL thin film samples. The additional joule energy thermally enhanced the synthesis of silver nanoparticles, which were patterned and embedded in the PMMA thin film. Surface plasmon resonance scattering of these silver nanoparticles was observed by dark-field optical microscopy, whereas the nanoparticle distribution was examined by transmission electron microscopy. Variations in the scanning probe temperatures and peroxide concentrations were carefully investigated to optimize the thermal lithography efficiency upon the addition of energetics.
能量辅助扫描热光刻（SThL）通过添加过氧化苯甲酰（BPO）来对银纳米粒子进行图案化。SThL 样品通过旋涂预先加载 BPO 和硝酸银前体的聚甲基丙烯酸甲酯（PMMA）薄膜来制备。通过探针加热进行的局部热分析表明，聚合物薄膜中的 BPO 分解发生在 80°C 的温度下。在该温度以上，热探针引发过氧化物的分解，导致在原位释放放热能量以补偿焦耳短缺，并在 SThL 薄膜样品中快速冷却。额外的焦耳能量通过热增强了银纳米粒子的合成，这些银纳米粒子被图案化并嵌入 PMMA 薄膜中。通过暗场光学显微镜观察到这些银纳米粒子的表面等离子体共振散射，而通过透射电子显微镜检查了纳米粒子的分布。仔细研究了扫描探针温度和过氧化物浓度的变化，以优化在添加能量剂时的热光刻效率。
