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大入射角下薄膜涂层宽带透过率的精确测量方法

Method for accurate measurement of wideband transmittance of thin-film coatings at large angle of incidence.

作者信息

Liu Yongli, Zhang Jinlong, Cheng Xinbin, Wang Zhanshan

机构信息

Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai 200092, China.

出版信息

Appl Opt. 2013 Jan 10;52(2):226-30. doi: 10.1364/AO.52.000226.

DOI:10.1364/AO.52.000226
PMID:23314639
Abstract

Accurate directional transmittance can reduce uncertainty in parameters regression of optical thin-films. When directional transmittance is measured at large angle of incidence (AOI), a polarizer has to be used to produce linearly polarized light and it also becomes an error source. This study presents a method for accurate measurement of wideband transmittance at large AOI, which is aimed to eliminate the polarization error in measured transmittance at oblique incidence. Using this method, we can measure the directional transmittance with a good precision if a partially polarized incident beam is provided. This method reduces the requirement for the performance of the polarizer, and will find application in the highly integrated spectrophotometers.

摘要

精确的定向透过率可以降低光学薄膜参数回归中的不确定性。当在大入射角(AOI)下测量定向透过率时,必须使用偏振器来产生线偏振光,而这也会成为误差源。本研究提出了一种在大入射角下精确测量宽带透过率的方法,旨在消除斜入射时测量透过率中的偏振误差。使用该方法,如果提供部分偏振的入射光束,我们就可以高精度地测量定向透过率。该方法降低了对偏振器性能的要求,并将在高度集成的分光光度计中得到应用。

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