Comparison of convergent beam electron diffraction methods for simultaneous structure and Debye Waller factor determination.

The measurement of accurate and precise structure factors and Debye Waller (DW) factors by quantitative convergent beam electron diffraction (QCBED) permits experimental determination of the electron density distribution and probing of interatomic bonding in crystals. The three QCBED methods used successfully for high precision measurements of low order structure factors to date, namely the zone axis pattern (ZAP) method, the excited row ER method and the multi-beam off-zone axis (MBOZA) technique, differ from each other regarding the crystal orientation relative to the incident electron beam. Consequently, the details of their respective dispersion surface representations differ regarding the number, relative amplitudes and phases of excited Bloch wave branches. Under the same experimental setup conditions, the factors most important to the degree of accuracy and precision achievable in electron density determination for crystals with QCBED methods ultimately depend on the sensitivity of the excited Bloch wave branches and the resultant contrast in the respective CBED patterns to changes in both structure and DW factors. In general, a QCBED pattern will be more sensitive to changes in both structure and DW factor, if it contains more and stronger excited Bloch wave branches, as dynamic interactions of the Bloch waves increase the sensitivity of the pattern. In this work we analyzed Bloch wave excitation and dispersion surfaces for the three most popular QCBED methods. The analysis indicates, that the QCBED patterns obtained using the MBOZA orientation generally contain more and stronger excited Bloch wave branches. Hence, MBOZA diffraction patterns are more sensitive than the ZAP and the ER patterns to changes in both DW and structure factors and therefore allow in differences to the other two methods simultaneous refinements effectively and robustly.