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对射频脉冲辉光放电飞行时间质谱法在新型材料深度剖面分析中的潜力的批判性评估。

Critical evaluation of the potential of radiofrequency pulsed glow discharge-time-of-flight mass spectrometry for depth-profile analysis of innovative materials.

机构信息

Department of Physics, University of Oviedo, c/ Gonzalo Gutiérrez Quirós, Campus de Mieres, 33600, Mieres, Spain.

出版信息

Anal Bioanal Chem. 2013 Jul;405(17):5655-62. doi: 10.1007/s00216-013-6914-1. Epub 2013 Apr 9.

DOI:10.1007/s00216-013-6914-1
PMID:23568611
Abstract

The combination of radiofrequency pulsed glow discharge (RF-PGD) analytical plasmas with time-of-flight mass spectrometry (TOFMS) has promoted the applicability of this ion source to direct analysis of innovative materials. In this sense, this emerging technique enables multi-elemental depth profiling with high depth resolution and sensitivity, and simultaneous production of elemental, structural, and molecular information. The analytical potential and trends of this technique are critically presented, including comparison with other complementary and well-established techniques (e.g. SIMS, GD-OES, etc.). An overview of recent applications of RF-PGD-TOFMS is given, including analysis of nano-structured materials, coated-glasses, photovoltaic materials, and polymer coatings.

摘要

射频脉冲辉光放电(RF-PGD)分析等离子体与飞行时间质谱(TOFMS)的结合,促进了该离子源在直接分析创新材料方面的适用性。从这个意义上说,这项新兴技术能够以高深度分辨率和灵敏度进行多元素深度剖析,并同时产生元素、结构和分子信息。本文批判性地介绍了该技术的分析潜力和趋势,包括与其他互补且成熟技术(例如 SIMS、GD-OES 等)的比较。文中还概述了 RF-PGD-TOFMS 的最新应用,包括对纳米结构材料、镀膜玻璃、光伏材料和聚合物涂层的分析。

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引用本文的文献

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Depth profile analysis of amorphous silicon thin film solar cells by pulsed radiofrequency glow discharge time of flight mass spectrometry.采用脉冲射频辉光放电飞行时间质谱法对非晶硅薄膜太阳能电池进行深度剖析分析。
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