Department of Polymer Engineering, The University of Akron, Akron, Ohio 44325, USA.
ACS Nano. 2013 Jun 25;7(6):5291-9. doi: 10.1021/nn401094s. Epub 2013 May 13.
Large-scale roll-to-roll (R2R) fabrication of vertically oriented nanostructures via directed self-assembly of cylindrical block copolymer (c-BCP) thin films is reported. Nearly 100% vertical orientation of cylinders in sub-100 nm c-BCP films under optimized processing via a dynamic sharp temperature gradient field termed Cold Zone Annealing-Sharp or 'CZA-S' is achieved, with successful scale-up on a prototype custom-built 70 ft × 1 ft R2R platform moving at 25 μm/s, with 9 consecutive CZA units. Static thermal annealing of identical films in a conventional vacuum oven fails to produce comparable results. As a potential for applications, we fabricate high-density silicon oxide nanodot arrays from the CZA-S annealed BCP thin film template.
本文报道了通过圆柱形嵌段共聚物（c-BCP）薄膜的定向自组装，在大规模卷对卷（R2R）工艺中制备垂直取向纳米结构。通过一种称为冷区退火-陡（CZA-S）的动态锐温度梯度场，在优化的工艺条件下，亚 100nm 的 c-BCP 薄膜中实现了近 100%的圆柱垂直取向，在一个定制的 70 英尺×1 英尺的 R2R 平台上成功扩展，平台移动速度为 25 μm/s，有 9 个连续的 CZA 单元。在传统的真空烘箱中对相同的薄膜进行静态热退火，无法获得可比的结果。作为潜在的应用，我们从 CZA-S 退火的 BCP 薄膜模板中制备了高密度的氧化硅纳米点阵列。
