Amanti M I, Bismuto A, Beck M, Isa L, Kumar K, Reimhult E, Faist J
Institute for Quantum Electronics, ETH-Zurich, CH-8093 Zurich, Switzerland.
Opt Express. 2013 May 6;21(9):10917-23. doi: 10.1364/OE.21.010917.
In this work we present a rapid and parallel process for the fabrication of large scale arrays of electrically driven nanopillars for THz quantum cascade active media. We demonstrate electrical injection of pillars of 200 nm diameter and 2 µm height, over a surface of 1 mm(2). THz electroluminescence from the nanopillars is reported. This result is a promising step toward the realization of zero-dimensional structure for terahertz quantum cascade lasers.
在这项工作中,我们展示了一种用于制造太赫兹量子级联有源介质的大规模电驱动纳米柱阵列的快速并行工艺。我们展示了在1平方毫米的表面上对直径200纳米、高度2微米的纳米柱进行电注入。报道了纳米柱的太赫兹电致发光。这一结果是朝着实现太赫兹量子级联激光器的零维结构迈出的有希望的一步。