Azmayesh-Fard Seyed M, Lam Lawrence, Melnyk Aaron, DeCorby Ray G
Department of Electrical and Computer Engineering, University of Alberta, ECERF Building, 9107 - 116 Street, NW, Edmonton, Alberta, Canada T6G2V4.
Opt Express. 2013 May 20;21(10):11889-900. doi: 10.1364/OE.21.011889.
We describe the monolithic integration of microfluidic channels, optical waveguides, a collimating lens and a curved focusing transmission grating in a single PDMS-based microsystem. All optical and fluidic components of the device were simultaneously formed in a single layer of high refractive index (n1.43) PDMS by soft lithography. Outer layers of lower-index (n1.41) PDMS were subsequently added to provide optical and fluidic confinement. Here, we focus on the design and characterization of the microspectrometer part, which employs a novel self-focusing strategy based on cylindrical facets, and exhibits resolution <10 nm in the visible wavelength range. The dispersive behavior of the grating was analyzed both experimentally and using numerical simulations, and the results are in good agreement with simplified analytical predictions.
我们描述了一种基于聚二甲基硅氧烷(PDMS)的微系统,其中微流体通道、光波导、准直透镜和弯曲聚焦透射光栅实现了单片集成。该器件的所有光学和流体组件均通过软光刻技术在单层高折射率(n≈1.43)的PDMS中同时形成。随后添加了低折射率(n≈1.41)的PDMS外层,以实现光学和流体的限制。在这里,我们重点关注微型光谱仪部分的设计和特性,该部分采用了基于圆柱面的新型自聚焦策略,在可见波长范围内分辨率小于10 nm。通过实验和数值模拟对光栅的色散行为进行了分析,结果与简化的解析预测结果吻合良好。
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