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平面聚二甲基硅氧烷透射光栅微型光谱仪的设计与制造

Design and fabrication of a planar PDMS transmission grating microspectrometer.

作者信息

Azmayesh-Fard Seyed M, Lam Lawrence, Melnyk Aaron, DeCorby Ray G

机构信息

Department of Electrical and Computer Engineering, University of Alberta, ECERF Building, 9107 - 116 Street, NW, Edmonton, Alberta, Canada T6G2V4.

出版信息

Opt Express. 2013 May 20;21(10):11889-900. doi: 10.1364/OE.21.011889.


DOI:10.1364/OE.21.011889
PMID:23736411
Abstract

We describe the monolithic integration of microfluidic channels, optical waveguides, a collimating lens and a curved focusing transmission grating in a single PDMS-based microsystem. All optical and fluidic components of the device were simultaneously formed in a single layer of high refractive index (n1.43) PDMS by soft lithography. Outer layers of lower-index (n1.41) PDMS were subsequently added to provide optical and fluidic confinement. Here, we focus on the design and characterization of the microspectrometer part, which employs a novel self-focusing strategy based on cylindrical facets, and exhibits resolution <10 nm in the visible wavelength range. The dispersive behavior of the grating was analyzed both experimentally and using numerical simulations, and the results are in good agreement with simplified analytical predictions.

摘要

我们描述了一种基于聚二甲基硅氧烷(PDMS)的微系统,其中微流体通道、光波导、准直透镜和弯曲聚焦透射光栅实现了单片集成。该器件的所有光学和流体组件均通过软光刻技术在单层高折射率(n≈1.43)的PDMS中同时形成。随后添加了低折射率(n≈1.41)的PDMS外层,以实现光学和流体的限制。在这里,我们重点关注微型光谱仪部分的设计和特性,该部分采用了基于圆柱面的新型自聚焦策略,在可见波长范围内分辨率小于10 nm。通过实验和数值模拟对光栅的色散行为进行了分析,结果与简化的解析预测结果吻合良好。

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