Yuan Yanping, Jiang Lan, Li Xin, Wang Cong, Yuan Lei, Qu Liangti, Lu Yongfeng
Laser Micro/Nano-Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing, China.
Appl Opt. 2013 Jun 10;52(17):4035-41. doi: 10.1364/AO.52.004035.
A quantum model with the consideration of laser wave-particle duality based on the plasma model is employed for the femtosecond laser pulse train processing of fused silica. Effects of the key pulse train parameters, such as the pulse separation time and the number of pulses per train on the distributions of free electron are discussed. The calculations show that the spatial/temporal distributions of free electron can be adjusted by transient localized electron dynamics control using femtosecond laser pulse train design; the results are ablation shapes of craters and subwavelength ripples. It is also found that the first pulse separation time (Δt1) can be used for rough adjustments of ablated structures, while the second pulse separation time (Δt2) can be used for the fine tuning of ablated structures, especially the shapes of craters.
基于等离子体模型并考虑激光波粒二象性的量子模型被用于熔融石英的飞秒激光脉冲串加工。讨论了关键脉冲串参数，如脉冲间隔时间和每串脉冲数对自由电子分布的影响。计算结果表明，通过飞秒激光脉冲串设计进行瞬态局域电子动力学控制，可以调整自由电子的空间/时间分布；其结果是形成坑洼和亚波长波纹的烧蚀形状。还发现，第一个脉冲间隔时间（Δt1）可用于烧蚀结构的粗调，而第二个脉冲间隔时间（Δt2）可用于烧蚀结构的微调，特别是坑洼的形状。
