Modabberifar M
Department of Mechanical Engineering, Faculty of Engineering, Arak University, Arak 38156-8-8849, Iran.
Rev Sci Instrum. 2013 Jun;84(6):065001. doi: 10.1063/1.4807700.
The present paper proposes a method for positioning and control of dielectric sheet displacement using a novel built-in position sensor for an electrostatic induction sheet conveyor (EISC) which is used for dielectric sheet conveying. The actuator utilizes electrostatic actuation technology based on induced charges and can be used in automated systems for conveying dielectric sheets. The proposed sensing system superimposes a high-frequency sensors signal onto a low-frequency driving signal and uses the actuator's electrodes for position sensing. The operational principle of the built-in sensor is similar to typical capacitance-type linear encoder. In this paper, details of the built-in position sensor based on the exact model of the actuator and feedback position control are reported. The experimental results confirmed that the sensor can work successfully by sharing the same electrodes with the driving operation.
本文提出了一种用于电介质片材输送的静电感应片材输送机（EISC）的新型内置位置传感器，用于定位和控制电介质片材位移的方法。该致动器利用基于感应电荷的静电驱动技术，可用于电介质片材输送的自动化系统。所提出的传感系统将高频传感器信号叠加到低频驱动信号上，并利用致动器的电极进行位置传感。内置传感器的工作原理类似于典型的电容式线性编码器。本文报道了基于致动器精确模型的内置位置传感器和反馈位置控制的详细信息。实验结果证实，该传感器通过与驱动操作共享相同的电极能够成功工作。
