Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
Biomicrofluidics. 2012 Jul 20;6(3):36501. doi: 10.1063/1.4739075. Print 2012 Sep.
We demonstrate monolithic integration of fine cylindrical glass microcapillaries (diameter ∼1 μm) on silicon and evaluate their performance for electrophoretic separation of biomolecules. Such microcapillaries are achieved through thermal reflow of a glass layer on microstructured silicon whereby slender voids are moulded into cylindrical tubes. The process allows self-enclosed microcapillaries with a uniform profile. A simplified method is also described to integrate the microcapillaries with a sample-injection cross without the requirement of glass etching. The 10-mm-long microcapillaries sustain field intensities up to 90 kV/m and limit the temperature excursions due to Joule heating to a few degrees Celsius only.
我们展示了精细圆柱形玻璃微毛细管(直径约 1μm)在硅片上的整体集成,并评估了它们在生物分子电泳分离方面的性能。这种微毛细管是通过在微结构硅片上的玻璃层进行热回流来实现的,在此过程中,细长的空隙被模制成圆柱形管。该工艺允许自封闭的微毛细管具有均匀的轮廓。还描述了一种简化的方法来将微毛细管与样品注入交叉集成,而无需进行玻璃蚀刻。10 毫米长的微毛细管可承受高达 90kV/m 的场强,并且由于焦耳加热引起的温度变化仅局限在几度范围内。