Dzierwa Andrzej, Reizer Rafal, Pawlus Pawel, Grabon Wieslaw
Rzeszow University of Technology, Powstancow Warszawy Rzeszow, Poland.
Scanning. 2014 Jan-Feb;36(1):170-83. doi: 10.1002/sca.21115. Epub 2013 Jul 22.
Several random surface topographies were analyzed. They were measured by optical (Talysurf CCI Lite) method. They represent one- and two-process anisotropic and isotropic surfaces. These surfaces were rotated of ± 1° and ± 2° by two methods: on the plane table (before measurement) and virtually (after measurement) using the software TalyMap Gold. After each measurement or surface rotation, each surface was levelled. Then, the forms were removed using polynomial of the 3rd degree. Areal surface topography parameters from standard ISO 25178 were calculated. The relative deviations of parameters were determined. The tendency of surface topography changes characteristic to various surface types were analyzed. It was found that change in orientation to the measurement direction of both isotropic and anisotropic surfaces could be substantial source of the measurement uncertainty. Functional parameter Smr and also feature parameters Sda, Sha, Sdv, Shv, and Spd are the mostly sensitive on measurement orientation. Statistical amplitude parameters Sa and Sq are more stable than parameters describing maximum surface height, like Sz, Sp, and Sv. The effect of surface orientation to measurement direction on values of functional parameters from V group was small. It was shown that changes of Sdq, Sdr, and Spc parameters describing hybrid properties due to surface rotation before measurement were smaller than those caused by change in surface orientation after measurement.
对几种随机表面形貌进行了分析。它们采用光学（泰勒霍夫CCI Lite）方法进行测量。它们代表单过程和双过程各向异性及各向同性表面。这些表面通过两种方法旋转了±1°和±2°：在平面台上（测量前）以及使用TalyMap Gold软件进行虚拟旋转（测量后）。每次测量或表面旋转后，都对每个表面进行了调平。然后，使用三次多项式去除形状。计算了来自标准ISO 25178的表面形貌参数。确定了参数的相对偏差。分析了各种表面类型特有的表面形貌变化趋势。发现各向同性和各向异性表面相对于测量方向的取向变化可能是测量不确定度的重要来源。功能参数Smr以及特征参数Sda、Sha、Sdv、Shv和Spd对测量取向最为敏感。统计幅度参数Sa和Sq比描述最大表面高度的参数（如Sz、Sp和Sv）更稳定。表面相对于测量方向的取向对V组功能参数值的影响较小。结果表明，测量前表面旋转导致的描述混合特性的Sdq、Sdr和Spc参数的变化小于测量后表面取向变化引起的变化。
