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用于自供电准静态应变测量的超线性压电器件浮栅应变计。

An ultra-linear piezo-floating-gate strain-gauge for self-powered measurement of quasi-static-strain.

机构信息

Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824 USA.

出版信息

IEEE Trans Biomed Circuits Syst. 2013 Aug;7(4):437-50. doi: 10.1109/TBCAS.2012.2220764.

Abstract

In this paper we describe a self-powered sensor that can be used for in-vivo measurement of the quasi-static-strain and also for in-vivo measurement of the L1 norm of the strain signal. At the core of the proposed design is a linear floating-gate injector that can achieve more than 13 bits of precision in sensing, signal integration and non-volatile storage. The injectors are self-powered by the piezoelectric transducers that convert mechanical energy from strain-variations into electrical energy. A differential injector topology is used to measure the quasi-static strain by integrating the difference between the L1 norm of the piezoelectric signal generated during the positive and negative strain-cycles. The linear floating-gate injectors are integrated with charge-pumps, digital calibration circuits and digital programming circuits to form a system-on-chip solution that can interface with a standard bio-telemetry platform. We demonstrate the proof-of-concept self-powered measurement of quasi-static strain and L1 norm of the strain signal using sensor prototypes fabricated in a 0.5- μm standard CMOS process and validated using a bench-top biomechanical test setup.

摘要

本文介绍了一种自供电传感器,可用于活体测量准静态应变,也可用于活体测量应变信号的 L1 范数。所提出设计的核心是一个线性浮动栅注入器,可在传感、信号集成和非易失性存储方面实现超过 13 位的精度。注入器由将机械应变变化产生的机械能转换为电能的压电换能器自供电。采用差分注入器拓扑结构,通过整合在正应变循环和负应变循环期间产生的压电信号的 L1 范数之间的差值,来测量准静态应变。线性浮动栅注入器与电荷泵、数字校准电路和数字编程电路集成在一起,形成一个片上系统解决方案,可与标准生物遥测平台接口。我们使用在 0.5μm 标准 CMOS 工艺中制造的传感器原型,演示了准静态应变和应变信号 L1 范数的自供电测量的概念验证,并使用台式生物力学测试设置进行了验证。

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