使用抗反射涂层提高介质透射光栅的衍射效率

Improvement of diffraction efficiency of dielectric transmission gratings using anti-reflection coatings.

作者信息

Nagashima K, Kosuge A, Ochi Y, Tanaka M

机构信息

Quantum Beam Science Directorate, Japan Atomic Energy Agency, Kyoto 6190215, Japan.

出版信息

Opt Express. 2013 Aug 12;21(16):18640-5. doi: 10.1364/OE.21.018640.

DOI:10.1364/OE.21.018640

PMID:23938780

Abstract

A novel method for increasing diffraction efficiency of transmission gratings is proposed. In this method, dielectric multilayers are inserted between a grating region and a substrate. These multilayers work as an anti-reflection coating for the transmission grating. It is presented that a grating with 1740 grooves/mm has the diffraction efficiency over 99% using this anti-reflection coating.

摘要

提出了一种提高透射光栅衍射效率的新方法。在该方法中，在光栅区域和衬底之间插入介质多层膜。这些多层膜用作透射光栅的减反射涂层。结果表明，使用这种减反射涂层，每毫米1740条刻槽的光栅衍射效率超过99%。