共光路激光平面编码器。

Common-path laser planar encoder.

作者信息

Wu Chyan-Chyi, Chen Yan-Zou, Liao Chia-Huang

机构信息

Department of Mechanical and Electro-mechanical Engineering, Tamkang University, Taiwan.

出版信息

Opt Express. 2013 Aug 12;21(16):18872-83. doi: 10.1364/OE.21.018872.

DOI:10.1364/OE.21.018872

PMID:23938800

Abstract

This paper presents a common-path laser planar encoder (CLPE) for displacement measurements in the X- and Y- axes. The CLPE can effectively reduce the environmental disturbance to its lowest level. The experimental results of the CLPE match well with those of HP5529A for both short and long ranges. The CLPE can measure 2D displacement with high resolutions of 0.07 ± 0.021 nm and 0.07 ± 0.023 nm in the X- and Y- axes and also presents high system stabilities of -0.59 ± 0.43 nm/h and -0.63 ± 0.47 nm/h respectively in the X- and Y- axes. The CLPE has promising potential for nanometer resolution and large-range applications.

摘要

本文提出了一种用于X轴和Y轴位移测量的共光路激光平面编码器（CLPE）。该CLPE能够有效地将环境干扰降低到最低水平。CLPE的实验结果在短距离和长距离测量中均与HP5529A的结果匹配良好。CLPE在X轴和Y轴上能够以0.07±0.021 nm和0.07±0.023 nm的高分辨率测量二维位移，并且在X轴和Y轴上分别具有-0.59±0.43 nm/h和-0.63±0.47 nm/h的高系统稳定性。CLPE在纳米分辨率和大范围应用方面具有广阔的潜力。